繼電器啟動(dòng)時(shí)，繼電器會(huì)自動(dòng)準(zhǔn)備好參數(shù)列表。所有可能的模擬測(cè)量實(shí)際值參數(shù)見(jiàn)附錄A。靈活邏輯參數(shù)。任何表中所列的參數(shù)索引列表用來(lái)使繼電器顯示參數(shù)的選擇更為快速。如果通過(guò)繼電器鍵盤1 顯示來(lái)流覽整個(gè)參數(shù)列表將是非常費(fèi)時(shí)的，通過(guò)繼電器鍵盤輸入這個(gè)索引號(hào)可以令相應(yīng)的參數(shù)顯示出來(lái)。CTIVT上的8個(gè)通道都存儲(chǔ)在錄波文件中, 模塊通道在文件中的名稱如下:<插槽位號(hào)><端子號(hào)>- .<| 或V><A. B或C相,或第4個(gè)輸入>

APPLIED EPI PN 301487 GASKET-FACE, SLIT-VALVE,

Lambda MX 13150

VEECO PROCESS METOR PN 304654

Tokyo Electron Heater, 2 TR0803 DS043-001614-1

TEL TOKYO ELECTRON 1181-000337-19 PCB ASSY MC31049-2

TD370/400 TURBO VACUUM PUMP CONTROLLER

GLASSMAN POWER SUPPLY PSWG-20P-15-M3

TEL TOKYO ELECTRON 1181-000465-12 PCB ASSY MC 31109A,D/

TEL TOKYO ELECTRONIC 1181-000537-15 PCB ASSY MC 31106A

EDWARDS ACTIVE GAUGE CONTROLLER D38661000

TEL TOKYO ELECTRON 1181-000538-12 PCB ASSY MC-31107A D/

Domnick Hunter 040AR O Ring Kit 4-Oil X Evolution 50 4

Domnick Hunter 040AR O Ring Kit 4-Oil X Evolution 50 4

AMAT 0200-04235 ISOLATOR 0200-04235 CERAMIC

VERITY INSTRUMENTS EP1001 SYSTEM CONTROLLER 100-240V

VERITY INSTRUMENTS EP1001 SYSTEM CONTROLLER 100-260V

Mactronix-Eurek?a IIISR – UKA 650 Wafer Transfer Units

Mactronix-Eurek?a UKA 650A3 Wafer Transfer Unit

Mactronix Wafer Transfer Unit – Wafer Handler

Bruce 7660 BoatLoad Control modules BTI Furnace

APPLIED MATERIALS 0020-30797 PERFORATED PLATE SHOWER HE